ELECTRON BEAM IRRADIATOR HAVING EVACUATION VALVE AND METHOD CONTROLLING EVACUATION VALVE

摘要

PURPOSE: An electron beam irradiator having a vacuum valve and a method for controlling the vacuum valve are provided to simplify the structure of a vacuum generation part by providing a first and a second vacuum pressure to a chamber through a single valve structure. CONSTITUTION: A chamber (120) is installed on a base frame (110). A vacuum generation part (130) is connected to the chamber. The vacuum generation part provides a first vacuum pressure or a second vacuum pressure to the chamber. A vacuum valve part (140) is connected between the chamber and the vacuum generation part. The vacuum valve part selectively provides the first vacuum pressure or the second vacuum pressure to the chamber.