METHOD FOR PRODUCING SILICON CHLORIDE FROM SILICON SLUDGE

摘要

PURPOSE: A method for manufacturing silicon chloride from silicon sludge is provided to manufacture silicon chloride by removing oil, iron and silicon from silicon sludge; and selectively separating silicon carbide. CONSTITUTION: A method for manufacturing silicon carbide from silicon sludge comprises the steps of: removing oil by distilling silicon sludge generated in the process of manufacturing a semiconductor article; producing a silicon sludge solution by dispersing the silicon sludge in distilled water; treating the silicon sludge solution with ultrasonic waves; separating phases by centrifugating the silicon sludge solution; recovering silicon carbide particles from the silicon sludge solution with phases separated; and reacting the silicon carbide particles with chlorine gas. [Reference numerals] (AA) Example 1; (BB) Example 5; (CC) Example 6; (DD) Example 7; (EE) Comparative example 1; (FF) Comparative example 2