发明名称 |
Nozzle cleaning method and a computer-readable storage medium storing nozzle cleaning program |
摘要 |
Disclosed are a nozzle cleaning apparatus and a nozzle cleaning method, which are capable of effectively cleaning a nozzle for discharging a process liquid to a substrate. A nozzle 30 is accommodated in a cleaning container 2 having a funnel-shaped portion 2b. A solvent T as a cleaning liquid is supplied along an inner surface of the funnel-shaped portion 2b. The solvent T forms a vortex flow whirling around the nozzle 30. By exposing the nozzle 30 to the vortex flow, the nozzle 30 can be effectively, thoroughly cleaned.
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申请公布号 |
US8562753(B2) |
申请公布日期 |
2013.10.22 |
申请号 |
US20100974160 |
申请日期 |
2010.12.21 |
申请人 |
HIRAO TAKESHI;FUJIMOTO AKIHIRO;SOUMA YASUTAKA;TOKYO ELECTRON LIMITED |
发明人 |
HIRAO TAKESHI;FUJIMOTO AKIHIRO;SOUMA YASUTAKA |
分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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