| 摘要 |
PURPOSE: A flexible dielectric thin film and a manufacturing method thereof are provided to obtain a flexible thin film by producing a dielectric thin film in a low temperature process under 400°C. CONSTITUTION: A flexible dielectric thin film (100) includes a flexible member (110) and a dielectric layer (120). The flexible member has the surface roughness as nanometers. The flexible member is made of polyethersulfone, polyacrylate, polyether imide, polyethylene naphthalate, polyethylene terephthalate, polyphenylenesulfide, polyarylate, polyimide, polycarbonate, cellulose triacetate, cellulose acetate propionate, and combinations thereof. The dielectric layer is made of Bi-Nb group ceramic composition and formed on the upper side of the flexible member. [Reference numerals] (AA) Start; (BB) End; (S110) Decrease the intensity of illumination of the surface of a flexible member; (S120) Form a dielectric layer on the upper part of the flexible member; (S130) Increase a dielectric rate by heat treatment |
