| 发明名称 |
Lithographic apparatus, device manufacturing method and a control system |
| 摘要 |
A capillary passage is formed between a substrate holder and an edge structure. Along the capillary passage are arranged a plurality of electrodes which, when charged, become liquidphilic. The electrodes may be used to split droplets of liquid and pump the liquid along the capillary passage.
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| 申请公布号 |
US8564760(B2) |
申请公布日期 |
2013.10.22 |
| 申请号 |
US20100904617 |
申请日期 |
2010.10.14 |
| 申请人 |
LEENDERS MARTINUS HENDRIKUS ANTONIUS;DONDERS SJOERD NICOLAAS LAMBERTUS;KEMPER NICOLAAS RUDOLF;ASML NETHERLANDS B.V. |
发明人 |
LEENDERS MARTINUS HENDRIKUS ANTONIUS;DONDERS SJOERD NICOLAAS LAMBERTUS;KEMPER NICOLAAS RUDOLF |
| 分类号 |
G03B27/42;B01D57/02;B01D59/42;B01D59/50;B01D61/42;B01D61/58;C02F1/469;C07K1/26;C08F2/58;C25B7/00;C25B15/00;G01F1/64;G01L1/20;G01L9/18 |
主分类号 |
G03B27/42 |
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