| 摘要 |
<p>PURPOSE: A liquid processing apparatus is provided to prevent processing liquid from being reattached to a substrate by vertically arranging a top guide ring and a bottom guide ring around the substrate. CONSTITUTION: A substrate holding unit horizontally holds a substrate. A rotation driving unit rotates the substrate holding unit. A processing liquid supply unit (411,412) supplies processing liquid to the substrate. A rotary cup (51) guides the processing liquid. A top guide ring (42) and a bottom guide ring (43) are separately arranged.</p> |
