| 摘要 |
PURPOSE: A thickness change measuring device and a thickness change measuring method are provided to precisely measure a change in the thickness of a target object and to measures a thickness change aspect of the whole surface of the target object. CONSTITUTION: A thickness change measuring device includes a light emitting unit (10), a double slit (30), a target object (20), a light position detecting unit (40), and a signal processing unit. The double slit includes a first opening (31) and a second opening (32) which are separated in a direction across a light progressing direction and transmits the lights. The target object is arranged between the light emitting unit and the double slit, thereby transmitting the lights. The light position detecting unit receives coherent lights formed by the lights transmitted through the first and second openings, thereby detecting a position change of coherent patterns. The signal processing unit receives signals from the light position detecting unit, thereby measuring a change in the thickness of the target object. [Reference numerals] (10) Light emitting unit; (80) Processing unit; (90) Transfer control unit; (91) Driving unit |
