发明名称 Holding Apparatus for Substrate
摘要 A substrate fixing apparatus is provided to combine the first and second fixing frames through the magnetic force by the first and second magnetic members, thereby fixing a substrate between the first and second fixing frames. First fixing frame(100) has an opening formed at a predetermined portion corresponding to an object substrate. The second fixing frame(200) is located oppositely to the first fixing frame and has an opening formed at a portion corresponding to a predetermined area. The first supporter(110) is protruded toward the predetermined area from the first fixing frame and supports the first surface of the substrate. The second supporter(210) is formed to the second fixing frame and supports the second surface opposite to the first surface. The first magnetic member is formed at the first fixing frame along the edge of the first fixing frame. The second magnetic frame is formed at the second fixing frame and forms an attractive force between the first and second fixing frames by the interaction together with the first magnetic frame.
申请公布号 KR101319985(B1) 申请公布日期 2013.10.21
申请号 KR20060067517 申请日期 2006.07.19
申请人 发明人
分类号 G02F1/13 主分类号 G02F1/13
代理机构 代理人
主权项
地址
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