| 摘要 |
PURPOSE: A stage controlling method setting the rotary axis and the rotation center of a biaxial rotational stage is provided to minimize the location change before and after the rotation by precisely aligning the rotary axis and the rotation center of the biaxial rotational stage using an alignment mark. CONSTITUTION: A biaxial rotational stage (11) has one axis aligned to cross a CCD camera (20), and the other axis crossing the one axis. An alignment mark (30) is located in between the biaxial rotational stage and the CCD camera by corresponding to the CCD camera. A stage controlling method setting the rotary axis and the rotation center of the biaxial rotational stage includes a step of setting a rotary axis azimuth and a rotation center coordinate of the biaxial rotational stage using CCD images of the alignment mark. [Reference numerals] (40) Frame grabber; (50) Computer; (60) Stepping motor controller |
