| 摘要 |
<p>PURPOSE: A substrate transportation apparatus using electrostatic floating is provided to reduce the cost of equipment and the weight by transporting a substrate in a vacuum state. CONSTITUTION: A track (200) forms at least one conductor. A substrate (100) forms at least one conductor (110,210). A voltage application device produces a potential difference between the conductor of the track and the conductor of the substrate. A gap maintaining device maintains a gap between the track and the substrate. A driving device transfers the substrate along the track.</p> |
