| 摘要 |
PURPOSE: An apparatus for manufacturing a product with a functional layer and a method for controlling the same are provided to reduce production costs by performing pretreatment, formation of a functional layer, and post-cleaning in a single chamber. CONSTITUTION: An apparatus for manufacturing a product with a functional layer comprises a single chamber(1), a cleaning gas supply unit(200), a precursor supply unit(400), a discharge unit(100), and a control unit. Plasma reaction is implemented in the single chamber to form a functional layer on a base material. The cleaning gas supply unit supplies cleaning gas for cleaning the base material to the chamber. The precursor supply unit supplies precursor for forming the functional layer to the chamber. The discharge unit discharges gas from the inside to the outside of the chamber. The control unit controls the precursor supply unit, the cleaning gas supply unit, and the discharge unit so that pretreatment, formation of a functional layer, and post-cleaning take place in the single chamber. |
