ULTRA WATER PURE PLANT

摘要

PURPOSE: An ultrapure water manufacturing device is provided to stably manufacture the ultrapure water of high quality, simplify maintenance management and reduce manufacturing costs. CONSTITUTION: An ultrapure water manufacturing device comprises a base peat (2), a first pure water system (12) and a second pure water system (13). The base peat stores preprocessing water in which raw water is recycled. The first pure water system includes an ion-exchange resin apparatus (103) which removes ionic components among the preprocessing water, a reverse osmosis membrane device (105) and multiple processing systems which process the preprocessing water. The second pure water system processes first pure water processed at the first pure water system and supplies to the in-use position. [Reference numerals] (AA) Raw water