| 摘要 |
PROBLEM TO BE SOLVED: To provide a photosensitive resin composition having high sensitivity and excellent in resolution and rectangularity.SOLUTION: A photosensitive resin composition includes (A) a polymer component including a polymer having a monomer unit protected by an acid decomposable group, (B) a photoacid generator, (C) a compound represented by the following general formula (0), and (D) a solvent. (In the general formula (0), Rand Reach represent an aryl group, or a heterocyclic structure having one or more ethylenic bonds. Lrepresents a divalent to tetravalent connecting group having 2 to 4 ethylenic bonds, and n and m each represent 1 or 2.) |
