| 摘要 |
PROBLEM TO BE SOLVED: To enable an imaging-type two-dimensional coordinate measurement device with a movable camera mounted on an actuator to capture an image with a boundary of a tabular workpiece made clear in its entire measurement area and perform a highly accurate coordinate measurement.SOLUTION: A measurement workpiece (5) is mounted on a transparent plane table (4). A clearance between the measurement workpiece (5) and a camera (6) is supported by a height adjustment mechanism (3) so as to be kept constant in an entire range where the camera (6) is movable by a Y-axis actuator (7) and an X-axis actuator (8). A plane illumination (2) placed below the plane table (4) is larger than a movement range of the camera (6). Vertical parallel-transmitted light is supplied to the plane table (4) and the measurement workpiece (5), thereby allowing illumination light without refraction to capture a shadowless image, and a highly accurate two-dimensional measurement device is achieved by a precise camera imaging. |
