LASER DEVICE, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an amplifier which amplifies a seed laser beam with high efficiency.SOLUTION: The amplifier includes: a plurality of discharge tubes arranged on an optical path of a seed laser beam; and a reflection optical system which is arranged between the discharge tubes so that the seed laser beam forms a predetermined optical path, and which forms an image of a point light source at a predetermined point.