| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying arm, a conveying device, and a conveying method for conveying a substrate while controlling charging by metal contamination and static electricity.SOLUTION: A conveying arm 1 of a substrate 11 includes: a holding part 12, consisting of an insulator, that contacts with and holds the substrate 11; a metal part 13, consisting of a conductor, that is grounded; and a conductive coating 14, consisting of a conductor, that contacts with the substrate 11 and the metal part 13. Moreover, a conductive part 14 is located between the substrate 11 and the grounded part 13 and is fixed by the grounded part 13. |
