发明名称 |
SYSTEM FOR DELIVERY OF PURIFIED MULTIPLE PHASES OF CARBON DIOXIDE TO A PROCESS TOOL |
摘要 |
A carbon dioxide supply method and system for supplying supercritical and subcritical phases of carbon dioxide on-demand to a substrate to create a novel and improved cleaning sequence for removal of contaminants contained in the substrate. The ability for the supply system to deliver vapor, liquid and supercritical phases of carbon dioxide in a specific sequence at predetermined times during a process cleaning sequence produces an improved removal of contaminants from the substrate compared to conventional carbon dioxide cleaning processes.
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申请公布号 |
US2013269732(A1) |
申请公布日期 |
2013.10.17 |
申请号 |
US201313862709 |
申请日期 |
2013.04.15 |
申请人 |
BANERJEE SOUVIK;GERRISTEAD, JR. WILLIAM R. |
发明人 |
BANERJEE SOUVIK;GERRISTEAD, JR. WILLIAM R. |
分类号 |
B08B3/08 |
主分类号 |
B08B3/08 |
代理机构 |
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代理人 |
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地址 |
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