发明名称 RESONATOR, FREQUENCY FILTER, DUPLEXER, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING RESONATOR
摘要 PROBLEM TO BE SOLVED: To provide a resonator which does not require machining of a support substrate, and to provide a frequency filter, a duplexer, an electronic device, and a method for manufacturing a resonator.SOLUTION: A resonator 100 according to the present invention includes a support substrate 101, a piezoelectric layer 103, excitation electrodes 104, and a bonding layer 102. The piezoelectric layer 103 comprises a piezoelectric material. The excitation electrodes 104 are formed on a surface of the piezoelectric layer 103 and excite a bulk acoustic wave of the piezoelectric layer 103. The bonding layer 102 has an air gap formed therein which faces the excitation electrodes 104 across the piezoelectric layer 103, and bonds the support substrate 101 and the rear surface of the piezoelectric layer 103 to each other.
申请公布号 JP2013214954(A) 申请公布日期 2013.10.17
申请号 JP20120278237 申请日期 2012.12.20
申请人 TAIYO YUDEN CO LTD 发明人 TAKAHASHI TOMOYUKI
分类号 H03H9/25;H03H3/08;H03H9/64;H03H9/72 主分类号 H03H9/25
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