| 摘要 |
PROBLEM TO BE SOLVED: To provide a high quality artificial graphite membrane extremely thin, large in area, excellent in uniformity and having an electric conductivity in an a-b face direction of not less than 25,000 S/cm.SOLUTION: A graphite membrane has a thickness of 2 nm-4.5 μm, a thickness distribution of not greater than ±15% and electric conductivity at 25°C in an a-b face direction of not less than 25,000 S/cm, and a method for producing the graphite membrane includes a process in which a polyamic acid membrane obtained by vapor deposition polymerization is heated to obtain a polyimide membrane having a thickness of 10 nm-10 μm and a process in which the obtained polyimide membrane is heat-treated at a temperature not lower than 2,200°C to obtain the graphite membrane. |
