ILLUMINATION DEVICE, AND MICROSCOPE APPARATUS INCLUDING THE ILLUMINATION DEVICE

摘要

An illumination device includes a phase-modulation type spatial light modulator that is arranged at a position optically conjugate to a pupil position of an illumination lens between a light source and the illumination lens for irradiating light emitted from the light source on a sample, and a pupil projecting optics system for projecting at least one area within the pupil of the illumination lens onto a plurality of different areas of the spatial light modulator.