发明名称 MICROPLASMA GENERATOR WITH ARRAY OF TAPERED MICROSTRIPS
摘要 A plasma generator ignites and sustains a uniform and linear plasma near atmospheric pressure. The plasma generator is composed of two power supplies, a power divider, an array of transmission line tapers and an ignition resonator. One microwave power supply is used to drive the taper array and the other power supply drives the ignition resonator. The power divider splits the taper array power evenly and delivers it to each taper. A plasma is ignited by the ignition resonator and then the plasma propagates to the taper array. The taper array does not start a plasma by itself and the ignition resonator is provided to do so. Increasing the number of tapers increases the length of the plasma.
申请公布号 WO2013119313(A3) 申请公布日期 2013.10.17
申请号 WO2012US68427 申请日期 2012.12.07
申请人 TRUSTEES OF TUFTS COLLEGE 发明人 MIURA, NAOTO
分类号 H01L31/042 主分类号 H01L31/042
代理机构 代理人
主权项
地址