ARTICLE HAVING FINE PATTERN ON SURFACE THEREOF, MANUFACTURING METHOD THEREFOR, OPTICAL ARTICLE, MANUFACTURING METHOD THEREFOR, AND METHOD FOR MANUFACTURING DUPLICATE MOLD

摘要

In this method for manufacturing an article having a fine pattern on the surface thereof, a cycle consisting of the following steps is repeated twice: a step in which a transfer-material film is formed on the surface of a substrate; a step in which a negative pattern on a mold is transferred to the transfer-material film; a step in which etching is performed using the transfer-material film as an etching mask; and a step in which the remaining transfer-material film is removed. In this method, a fine pattern formed in the first cycle is not etched during the etching in the second cycle. Immediately before the etching in the second cycle, the thickness (d) of the transfer-material film on top of the fine pattern formed in the first cycle satisfies the relation r.(H/R) + t < d (where r represents the rate at which the transfer-material film is etched, H represents the target etching depth, R represents the rate at which the substrate is etched, and t represents the thickness of the remaining film).