发明名称 FILM FOR PROCESS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a film for process, by which a bump is stably formed and the yield of a semiconductor device is improved, and to provide a method of manufacturing the semiconductor device, by which the yield of the semiconductor device is improved.SOLUTION: A film for process is the film for process to be used for the manufacture of the semiconductor device. The film for process is used to peel off a semiconductor member after the semiconductor member is fixed to the film for process to form the bump, and the adhesive force of the film for process after heated at 80°C for 4 hours is ≥60 cN/25 mm and ≤1000 cN/25 mm.
申请公布号 JP2013213088(A) 申请公布日期 2013.10.17
申请号 JP20120082784 申请日期 2012.03.30
申请人 SUMITOMO BAKELITE CO LTD 发明人 ODA NAOYA
分类号 C09J7/02;C09J175/16;C09J201/00;H01L21/60 主分类号 C09J7/02
代理机构 代理人
主权项
地址