| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for purifying hydrogen in a production method of polycrystalline silicon by thermal decomposition of trichlorosilane and hydrogen reduction, enabling to easily obtain high purity polycrystalline silicon of 99.999999999% or more purity.SOLUTION: As the generation source of hydrogen, electrolysis of metal inorganic acid salt and/or metal hydroxide of common salt, potassium hydroxide or the like in aqueous solution is adopted, and generated hydrogen is washed with water, and then removal of microparticles is performed by filtering. Because the electrolysis is performed in an aqueous solution of the metal inorganic acid salt and/or metal hydroxide, any carbon content does not mix in hydrogen, and the metal hydroxide (as microparticle) can be removed in very high efficiency by the washing with water and filtering with a filter. |
