发明名称
摘要 A method and apparatus for forming a sheet wafer melts feedstock material in a crucible that is part of a crystal growth furnace, passes a plurality of filaments through the crucible to form a sheet wafer, and cuts a portion of the sheet wafer to form a smaller sheet wafer. The method and apparatus then determine the weight of the smaller sheet wafer, and control the temperature of the melted feedstock material (e.g., by controlling crucible temperature or by interfacing with another temperature control system) as a function of the determined weight.
申请公布号 JP2013538781(A) 申请公布日期 2013.10.17
申请号 JP20130531906 申请日期 2011.09.30
申请人 发明人
分类号 C30B29/06;C30B33/00 主分类号 C30B29/06
代理机构 代理人
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