发明名称 |
PATTERN DETERMINATION DEVICE AND COMPUTER PROGRAM |
摘要 |
An object of the invention is to provide: a sample unevenness device that stably identifies unevenness formed on a sample, regardless of a pattern formation state or image acquisition conditions; and a computer program. As an aspect to achieve the above object, a device and computer program are proposed that obtain the area of a plurality of regions formed by a profile waveform of a given threshold or lower for a profile formed based on a detection signal obtained by scanning with a charged particle beam with respect to the sample; and determine either or both of that a site corresponding to a region with a relatively large area is a concave portion or that a space portion and a site corresponding to a space with a relatively small area is a convex portion or a line portion.
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申请公布号 |
US2013270436(A1) |
申请公布日期 |
2013.10.17 |
申请号 |
US201113882134 |
申请日期 |
2011.10.14 |
申请人 |
NAMAI HITOSHI;YAMAGUCHI SATORU;SASAJIMA FUMIHIRO;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
NAMAI HITOSHI;YAMAGUCHI SATORU;SASAJIMA FUMIHIRO |
分类号 |
G01B21/30 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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