发明名称 IMPRINT DEVICE, PRESSURE APPLYING MEMBER, AND IMPRINT MANUFACTURING METHOD
摘要 <p>Provided are an imprint device capable of applying pressure to a mold and a workpiece more evenly, a pressure applying plate used in the imprint device, and an imprint manufacturing method. According to the invention, an imprint device (1) that transfers the shape formed on a mold (4) to a workpiece (6) includes a pressure applying member (2) having a pressure applying surface (15) for pressing the mold (4) and the workpiece (6) against each other, a pressure applying unit (10) that applies pressure applying force to the pressure applying member (2), and UV-LEDs (3) that irradiate in order to harden the workpiece (6) to which the shape of the mold (4) has been transferred. The pressure applying member (2) includes a light transmission layer (5) that transmits light at least from the UV-LEDs (3) and that functions as the pressure applying surface (15), and a pressure receiving layer (43) that conveys the pressure applying force from the pressure applying unit (10) to the light transmission layer (5). The UV-LEDs (3) are placed in the pressure applying member (2).</p>
申请公布号 WO2013153613(A1) 申请公布日期 2013.10.17
申请号 WO2012JP59732 申请日期 2012.04.09
申请人 ITRIX CORPORATION;HASEGAWA SHOJI;KAMIYA NAGISA 发明人 HASEGAWA SHOJI;KAMIYA NAGISA
分类号 H01L21/027;B29C59/02 主分类号 H01L21/027
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