发明名称 GROUP III NITRIDE SEMICONDUCTOR CRYSTAL
摘要 PROBLEM TO BE SOLVED: To solve such problems that when producing a light-emitting element in the long wavelength region using a group III nitride semiconductor crystal such as gallium nitride, inconsistency with a lattice constant is generated so that desired light-emitting wavelength cannot be obtained; and the group III nitride semiconductor crystal causes large warpage of a crystal plane due to internal stress resulting in deterioration factor of quality and yield.SOLUTION: A group III nitride semiconductor crystal, in which the principal crystal plane has a convexly curved area in the growing direction and a convexly curved area in a reverse direction to the growing direction, is suitable to the substrate of a light-emitting element in the long wavelength region, and can be a high quality group III nitride semiconductor crystal improved in warpage of the crystal plane.
申请公布号 JP2013212946(A) 申请公布日期 2013.10.17
申请号 JP20120083234 申请日期 2012.03.30
申请人 MITSUBISHI CHEMICALS CORP 发明人 UCHIYAMA YASUHIRO;FUJITO TAKESHI;NAGAO SATORU;KIYOMI KAZUMASA
分类号 C30B29/38 主分类号 C30B29/38
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