| 摘要 |
A piezoelectric layer is formed with a perovskite type oxide at least containing Bi, Ba, Fe, and Ti and when, in 2theta-theta measurement using a two-dimensional detector, an angle formed by a plane including an incident X-ray, a sample, and the center position of the two-dimensional detector and a diffraction line diffracted from the sample is defined as chi and when, in a scattering intensity of the diffraction line obtained by measuring the piezoelectric layer, the integrated intensity in the range of 0°@chi@10° and 31°@2theta@33° is defined as I1 and the integrated intensity in the range of 10°@chi@20° and 31°@2theta@33° is defined as I2, I1/I2 is 2.0 or more.
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