ILLUMINATION INTENSITY CORRECTION DEVICE FOR PREDEFINING AN ILLUMINATION INTENSITY OVER AN ILLUMINATION FIELD OF A LITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

摘要

An illumination intensity correction device (24) serves for predefining an illumination intensity over an illumination field (18) of a lithographic projection exposure apparatus. The correction device (24) has a plurality of bar-shaped individual stops (27) arranged alongside one another and having bar axes (28) arranged parallel to one another, which are arranged in a manner lined up alongside one another transversely with respect to the bar axes. The individual stops (27) are displaceable into a predefined intensity correction displacement position at least along their respective bar axis (28) with the aid of a displacement drive (29) individually for the purpose of predefining an intensity correction of an illumination of the illumination field (18). At least some of the individual stops (27FB) are embodied as field delimiting individual stops such that they are displaceable along their bar axis (28) between a completely extended extension position and a completely retracted retraction position by more than a field extent (18y) of the illumination field (18) which the latter has along the bar axis (28). This results in an illumination intensity correction device having an improved correction accuracy in comparison with the prior art.