发明名称 PHOTOSENSITIVE COMPOSITION, COMPOUND FOR USE IN THE PHOTOSENSITIVE COMPOSITION AND PATTERN FORMING METHOD USING THE PHOTOSENSITIVE COMPOSITION
摘要 A photosensitive composition comprising: (A) a compound capable of generating a compound having a specific structure upon irradiation with actinic rays or radiation, a pattern forming method using the photosensitive composition, and a compound capable of generating a compound having a specific structure upon irradiation with actinic rays or radiation.
申请公布号 KR101319457(B1) 申请公布日期 2013.10.17
申请号 KR20060046154 申请日期 2006.05.23
申请人 发明人
分类号 G03F7/004 主分类号 G03F7/004
代理机构 代理人
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