| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid drop applicator preventing liquid such as a resist liquid or washing liquid collected around a seal ring, from sticking to a substrate.SOLUTION: A liquid drop applicator (100) includes a rotary table (20) having a first surface (21) and a rotary shaft, and a seal ring (30) abutting against the rear face of a substrate. The liquid drop applicator further includes an exhaust tube (50) exhausting air from a space (SP1) formed by the rear face of the substrate, the seal ring and the first surface of the rotary table, and a dispenser (60) applying liquid to the surface of the substrate. The rotary table (20) has a stepped part (28) recessed to the lower side from the first surface of the rotary table and having a side face (25) on the rotary shaft side and a second surface (26). The seal ring (30) is arranged to abut on the side face (25) and the second face (26). There is no protrusion on the upper side of the second surface on the side, opposite to the rotary shaft side, of the second surface (26) of the stepped part. |
