ELECTROSTATIC CHUCK WITH FINE ELECTRODE STRUCTURE

摘要

PURPOSE: An electrostatic chuck with a fine electrode structure is provided to improve the stability of chucking by minutely arranging the gap and the width of an electrode by the micrometer. CONSTITUTION: Electrodes (100) are formed in an insulator (200). The electrodes have widths of micro sizes. The electrodes are separated from each other by the micrometer. The bonding surface of a substrate is bonded to an electrostatic chuck. The electrodes reduce the intensity of an electric field applied to the back boding surface of the substrate.