| 摘要 |
The invention creates a micromechanical pressure sensor having a highly dynamic measurement range. The pressure sensor has two pressure-sensitive, closed sensor diaphragms, wherein each of the two sensor diaphragms can be coupled to an individual pressure reservoir, and a stop device arranged between the sensor diaphragms and having the following elements: an anchoring element for anchoring the stop device to at least one sensor diaphragm; at least one coupling element connecting the two sensor diaphragms substantially rigidly; supporting elements, with which contact can be made with one of the sensor diaphragms in the event of a defined geometric deflection; and a sealing element for sealing off the stop device. As a result of the substantially rigid coupling of the two sensor diaphragms, subtraction of individual absolute pressure values is advantageously dispensed with.
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