发明名称 |
METHOD FOR FORMING AN ULTRASONIC TRANSDUCER, AND ASSOCIATED APPARATUS |
摘要 |
A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.
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申请公布号 |
US2013270967(A1) |
申请公布日期 |
2013.10.17 |
申请号 |
US201313907046 |
申请日期 |
2013.05.31 |
申请人 |
RESEARCH TRIANGLE INSTITUTE |
发明人 |
DAUSCH DAVID;GOODWIN SCOTT H. |
分类号 |
H01L41/047;H01L41/293 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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