发明名称 STRUCTURE AND METHOD FOR NFET WITH HIGH K METAL GATE
摘要 The present disclosure provides an integrated circuit. The integrated circuit includes a semiconductor substrate; a n-type filed effect transistor (nFET) formed on the semiconductor substrate and having a first gate stack including a high k dielectric layer, a capping layer on the high k dielectric layer, a p work function metal on the capping layer, and a polysilicon layer on the p work function metal; and a p-type filed effect transistor (pFET) formed on the semiconductor substrate and having a second gate stack including the high k dielectric layer, the p work function metal on the high k dielectric layer, and a metal material on the p work function metal.
申请公布号 US2013270647(A1) 申请公布日期 2013.10.17
申请号 US201213448846 申请日期 2012.04.17
申请人 ZHU MING;NG JIN-AUN;LIU CHI-WEN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 ZHU MING;NG JIN-AUN;LIU CHI-WEN
分类号 H01L27/092;H01L21/8238 主分类号 H01L27/092
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