| 摘要 |
PURPOSE: An X-ray inspection apparatus is provided to drastically reduce the whole size and production cost of the X-ray inspection apparatus by being composed of a drive motor and a power transmission which are small in capacity and size. CONSTITUTION: An X-ray inspection apparatus (100) comprises a conveying unit, an X-ray source (103), an X-ray detector (105), and an orientation control unit. The conveying unit supports and transfers an object to be inspected. The X-ray source irradiates the inspected object with an X-ray. The X-ray detector is equipped with a time delay integration (TDI) camera (178) which detects an projected image when the X-ray penetrates the inspected object. The orientation control unit rotates the TDI camera around the optical axis of the TDI camera to control the scanning orientation of the TDI camera for the inspected object. |
