摘要 |
PROBLEM TO BE SOLVED: To provide a gyro sensor that allows an error due to acceleration to be reduced while allowing angular speeds around multiple axes with a small number of vibration masses, and further to provide an electronic apparatus using the gyro sensor.SOLUTION: A gyro sensor 1 comprises: a vibration mass 10 provided with a movable detection electrode section; a detection electrode 80 disposed at a position where the detection electrode 80 overlaps with the drive mass 10 as viewed in a plan view; first drive sections 20a extending from the vibration mass 10 in a first direction; second drive sections 20b extending from the vibration mass 10 in a second direction intersecting with the first direction; and AC power source sections 50 for applying AC voltages to the first drive sections 20a and the second drive sections 20b such that phase differences of the second drive sections 20b with respect to the first drive sections 20a are 90 degrees. The vibration mass 10 is driven by the first drive sections 20a and the second drive sections 20b and a central portion thereof is subjected to rotation motion. |