发明名称 EFFICIENT AND SIMPLE METHOD FOR METALORGANIC CHEMICAL VAPOR DEPOSITION
摘要 The present invention provides a method of preparing metal or metal oxide particles on a substrate by forming a reaction mixture of a metal or metal oxide precursor and a substrate, and heating the reaction mixture at reduced pressure, such that metal or metal oxide particles are formed on the substrate.
申请公布号 US2013273246(A1) 申请公布日期 2013.10.17
申请号 US201213627758 申请日期 2012.09.26
申请人 SAFCELL, INC. 发明人 CHISHOLM CALUM R.I.;PAPANDROW ALEX
分类号 C23C16/18 主分类号 C23C16/18
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