发明名称 |
REPLACEMENT GATE STRUCTURES AND METHODS OF MANUFACTURING |
摘要 |
Gate structures and methods of manufacturing is disclosed. The method includes forming a continuous replacement gate structure within a trench formed in dielectric material. The method further includes segmenting the continuous replacement gate structure into separate replacement gate structures. The method further includes forming insulator material between the separate replacement gate structures.
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申请公布号 |
US2013270644(A1) |
申请公布日期 |
2013.10.17 |
申请号 |
US201213444447 |
申请日期 |
2012.04.11 |
申请人 |
ANDERSON BRENT A.;NOWAK EDWARD J.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANDERSON BRENT A.;NOWAK EDWARD J. |
分类号 |
H01L27/088;H01L21/762 |
主分类号 |
H01L27/088 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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