HOLDER FOR MEASURING SURFACE ORIENTATION OF WAFER AND MEASURING APPARATUS OF THE SAME

摘要

PURPOSE: A holder for measuring the surface orientation of a wafer and an apparatus for measuring the same are provided to perform an accurate measurement process by using a wafer surface as a measurement reference surface. CONSTITUTION: An upper holder (220) arranges a wafer. The upper holder forms a first reference edge. A lower holder (210) is formed on the upper surface of a rotary shaft. The lower holder includes a support unit. A second reference edge corresponds to the first reference edge.