SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device which has stable electrical characteristics and high reliability.SOLUTION: The semiconductor device includes: a gate electrode disposed over an insulating surface; a gate insulating film disposed over the gate electrode; a semiconductor film which is disposed over the gate insulating film and overlaps with the gate electrode; and a protective insulating film disposed over the semiconductor film. The protective insulating film includes a crystalline insulating film, and an aluminum oxide film disposed over the crystalline insulating film.