SEMICONDUCTOR LIGHT-EMITTING ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor light-emitting element having higher light extraction efficiency than ever before.SOLUTION: A method for manufacturing a semiconductor light-emitting element having higher light extraction efficiency than ever before includes the steps of: (a) forming a semiconductor laminate having a light-emitting layer on a growth substrate; (b) forming a first electrode composed of indium tin oxide on the semiconductor laminate; (c) thermally processing the first electrode in an atmosphere including oxygen; (d) thinning the thermally processed first electrode by etching; (e) forming a light reflection layer on the etched first electrode; (f) fixing the light reflection layer onto a support substrate and separating the growth substrate from the semiconductor laminate to expose the semiconductor laminate; and (g) forming a second electrode on a surface of the exposed semiconductor laminate.