| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device that can perform position control of a substrate with high accuracy.SOLUTION: A substrate stage device 20 comprises: a fine movement stage 30 that holds a substrate P and is movable along an XY plane; a Y step guide 50 which extends in an X-axis direction and is movable at a position in a Y-axis direction; and a weight cancel device 40 that includes a housing 42 provided on the Y step guide 50, an air spring device 44 provided inside the housing 42 and an auxiliary tank 48 provided inside the Y step guide 50 and communicating with the air spring device 44, supports dead weight of the fine movement stage 30 from below by use of the air spring device 44, moves in the X-axis direction along the Y step guide 50 and moves at the position in the Y-axis direction together with the Y step guide 50. |
