发明名称 FLUID CONTROLLER
摘要 A fluid controller is disclosed, having a body unit, a fluid controlling valve, pressure sensors, and a casing. The fluid controlling valve is attached to a component part attachment face of the body unit. The pressure sensors are attached to the component part attachment face so that the pressure sensing surfaces thereof are positioned substantially perpendicular to the component part attachment face and substantially parallel to the longitudinal direction. On the lateral walls of the casing, the inner surfaces thereof are arranged to be uneven, so that such sections facing the fluid controlling valve and the pressure sensors are arranged to be thin sections, whereas at least a part of such a section that does not face the fluid controlling valve and the pressure sensors is arranged to be a thick section that is thicker than the thin sections.
申请公布号 US2013269795(A1) 申请公布日期 2013.10.17
申请号 US201313861209 申请日期 2013.04.11
申请人 HORIBA STEC, CO., LTD. 发明人 YASUDA TADAHIRO
分类号 G05D7/01 主分类号 G05D7/01
代理机构 代理人
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