| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of reducing its size and preventing electrostatic force from being applied to a spring part.SOLUTION: A physical quantity sensor 100 according to the present invention comprises a substrate 10, a fixed part 23 fixed to the substrate 10, and a movable electrode part 50, and includes: a movable body 26 capable of being displaced in a first axis direction; fixed electrode parts 52, 54 provided on the substrate 10 and facing the movable electrode part 50; a spring part 30 that connects the fixed part 23 to an end part 26a of the movable body 26 and that has a first extension part 31a extending from the fixed part 23 along a second axis intersecting the first axis direction, a turning part 31b connected to the first extension part 31a, and a second extension part 31c extending from the turning part 31b along the second axis; and a wall part 40 provided outside the first extension part 31a and the turning part 31b of the spring part 30 in a planar view. The spring part 30 and the wall part 40 are electrically connected. |
