| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus that implements a short and simple treatment without breaking a workpiece or deforming the workpiece to an undesired shape.SOLUTION: A treatment apparatus 101 includes: a vacuum chamber 1 including an expansion section 2 capable of expansion and contraction in a first direction 91; a first electrode 51 exposed in the first direction 91 within the vacuum chamber 1; a second electrode 52 exposed toward a second punch within the vacuum chamber 1; a power supply 8 for applying a pulse voltage between both electrodes; a balance holding section 18 for holding the second electrode 52 in a state to move freely while canceling a gravity effect; a drive section 10 for advancing the first electrode 51 toward the second electrode 52 to press a workpiece; and a retreat limitation section 15 for limiting a distance of forced retreat of the second electrode 52. |
