发明名称 |
GUIDE APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE |
摘要 |
The present invention provides a guide apparatus including a guide member located on a base, and a moving member movable along the guide member. The guide apparatus comprising a plurality of plate members each including a portion facing the base and extending from the portion in a direction to separate from the base, wherein the plurality of plate members are located apart from each other in a direction to separate from the moving member.
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申请公布号 |
US2013273477(A1) |
申请公布日期 |
2013.10.17 |
申请号 |
US201313798900 |
申请日期 |
2013.03.13 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MOROHASHI AKIRA;KORENAGA NOBUSHIGE |
分类号 |
H01L21/677;F16M11/20 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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