发明名称 Apparatus for FinFETs
摘要 A FinFET comprises an isolation region formed in a substrate, a reverse T-shaped fin formed in the substrate, wherein a bottom portion of the reverse T-shaped fin is enclosed by the isolation region and an upper portion of the reverse T-shaped fin protrudes above a top surface of the isolation region. The FinFET further comprises a gate electrode wrapping the reverse T-shaped fin.
申请公布号 US2013270652(A1) 申请公布日期 2013.10.17
申请号 US201213446199 申请日期 2012.04.13
申请人 LIAW JHON-JHY;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LIAW JHON-JHY
分类号 H01L27/088 主分类号 H01L27/088
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