发明名称 APPARATUS FOR PRESSING A PLATE ASSEMBLY
摘要 PURPOSE: A pressure device is provided to drastically reduce process tact time by performing a loading and an unloading process in different chambers. CONSTITUTION: At least one chamber includes a tilting plate. The tilting unit opens and closes the tilting plate. A loading unit (2) loads a plate assembly into the chamber. A pressure unit (3) injects a pressurized gas into an accommodating part. An exhaust unit (4) purges the pressurized gas injected into the accommodating part.
申请公布号 KR101318929(B1) 申请公布日期 2013.10.17
申请号 KR20120065230 申请日期 2012.06.18
申请人 CLD CO., LTD. 发明人 KIM, KAEU WAN;KANG, HYE JONG;CHOI, MOON GI;YUN, IN SU
分类号 H01L51/56;G02F1/13 主分类号 H01L51/56
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