发明名称 |
APPARATUS FOR PRESSING A PLATE ASSEMBLY |
摘要 |
PURPOSE: A pressure device is provided to drastically reduce process tact time by performing a loading and an unloading process in different chambers. CONSTITUTION: At least one chamber includes a tilting plate. The tilting unit opens and closes the tilting plate. A loading unit (2) loads a plate assembly into the chamber. A pressure unit (3) injects a pressurized gas into an accommodating part. An exhaust unit (4) purges the pressurized gas injected into the accommodating part. |
申请公布号 |
KR101318929(B1) |
申请公布日期 |
2013.10.17 |
申请号 |
KR20120065230 |
申请日期 |
2012.06.18 |
申请人 |
CLD CO., LTD. |
发明人 |
KIM, KAEU WAN;KANG, HYE JONG;CHOI, MOON GI;YUN, IN SU |
分类号 |
H01L51/56;G02F1/13 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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